Optical subassembly and projection objective in...

Details Optical subassembly and projection objective in... Optical subassembly and projection objective in...

2003-12-03

2008-11-11

Ben, Loha (Department: 2873)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S846000, C359S811000, C359S813000, C359S819000, C359S820000, C359S822000

Reexamination Certificate

active

07448763

ABSTRACT:
An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).

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