Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2006-01-25
2008-12-23
Epps, Georgia Y. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S235000, C356S601000
Reexamination Certificate
active
07468507
ABSTRACT:
A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
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Elmaliach Nissim
Elyasef Emanuel
Litman Alon
Meshulach Doron
Naftali Ron
Applied Materials Israel, Ltd.
Epps Georgia Y.
Fahmi Tarek N.
Sohn Seung C.
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