Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-05-24
2005-05-24
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S069000, C355S070000, C430S030000, C430S311000
Reexamination Certificate
active
06897941
ABSTRACT:
A high resolution and high data rate spot grid array printer system is provided, wherein an image is formed by scanning spot-grid array of optical beams across a substrate layered with a resist. High resolution is achieved by apodizing the optical beams to provide a narrower main lobe. Unwanted recordation of side lobes upon the substrate is prevented by assuring that the side lobes do not include energy above the threshold of the resist, using a memoryless resist, and by using a slanted and interleaved scan pattern adapted for use with the spot-grid array pattern and the memoryless characteristic of the resist.
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Applied Materials Inc.
Mathews Alan
McDermott & Will & Emery
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