Optical spatial filtering for attenuating the zero diffractive o

Details Optical spatial filtering for attenuating the zero diffractive o Optical spatial filtering for attenuating the zero diffractive o

1994-07-13

1995-08-08

Lerner, Martin

Optical: systems and elements

Diffraction

Using fourier transform spatial filtering

250550, 355 53, 359564, 359562, G02B 2746

Patent

active

054404266

ABSTRACT:
Method and apparatus for forming an image of an object by optical projection with a focusing system comprising the steps of collimating a set of at least two mutually incoherent light beams from the light source to fall on the object from directions that makes the non-diffracted components intersect the aperture stop at a set of points that are distributed over the surface of the stop, attenuating in a spatial filter the zero diffraction order of each beam relative to diffraction orders diffracted in directions towards the centre of the aperture stop, and adding the images formed by the light beams.

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"Spatial Filtering for Depth of Focus and Resolution Enhancement in Optical Lithography," by H. Fukuda et al., Journal of Vacuum Science & Technology B, 9 (1991) Nov./Dec., No. 6, New York, pp. 3113-3116.

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