Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-12-12
2006-12-12
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S291000
Reexamination Certificate
active
07149022
ABSTRACT:
An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.
REFERENCES:
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6201628 (2001-03-01), Basiji et al.
patent: 2003/0035192 (2003-02-01), Mizuno et al.
patent: 2003/0039089 (2003-02-01), Lee et al.
Ko Young-chul
Lee Jin-ho
Lee Ju-hyun
Mun Yong-kweun
Buchanan & Ingersoll & Rooney PC
Cherry Euncha P.
Samsung Electronics Co,. Ltd.
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