Optical sample illumination device for a spectroscopic ellipsome

Details Optical sample illumination device for a spectroscopic ellipsome Optical sample illumination device for a spectroscopic ellipsome

1987-10-13

1988-12-13

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356327, G01N 2121

Patent

active

047906596

ABSTRACT:
The invention relates to an optical sample illumination device for a spectroscopic ellipsometer of the rotating analyzer type. The image of the exit slit (F') of a monochromator is conjugated with a point (F'.sub.2) of a surface of a sample (E) by means of two spherical mirrors (M.sub.7 and M.sub.8). An astigmatism correction slit (F'.sub.15) is arranged in the proximity of the conjugate (F'.sub.1) of the exit slit(F') of the monochromator with respect to the spherical mirror (M.sub.7) and is arranged perpendicularly to this exit slit and to the optical path so that said correction slit is conjugated with the said point (F'.sub.2) through the spherical mirror (M.sub.8). A luminous spot without astigmatic errors is thus obtained.

REFERENCES:
Theeten et al., "In Situ Measurement and Analysis of Plasma-Grown GaAs Oxides with Spectroscopic Ellipsometry", J. Electrochem. Soc.: Solid-State Sci. & Tech. pp. 378-385, 2/80.

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