Optical waveguides – Integrated optical circuit
Reexamination Certificate
2006-05-09
2006-05-09
Healy, Brian M. (Department: 2883)
Optical waveguides
Integrated optical circuit
C385S129000, C385S130000, C385S131000
Reexamination Certificate
active
07043106
ABSTRACT:
An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.
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Björkman Claes
Broydo Samuel
Maydan Dan
West Lawrence C.
Applied Materials Inc.
Healy Brian M.
Wilmer Cutler Pickering Hale and Dorr LLP
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