Optical properties restoration apparatus, the restoration...

Details Optical properties restoration apparatus, the restoration... Optical properties restoration apparatus, the restoration...

2007-03-06

2010-06-08

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Having ultraviolet absorbing or shielding property

C359S350000

Reexamination Certificate

active

07733563

ABSTRACT:
An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiO2or metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO2, MgO, TiO2, or ZrO2.

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