Optical projection lens system

Details Optical projection lens system Optical projection lens system

2005-08-16

2005-08-16

Epps, Georgia (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S754000, C359S683000

Reexamination Certificate

active

06930837

ABSTRACT:
An optical projection lens system for microlithography comprising in the direction of propagating radiation: a first lens group having positive refractive power, a second lens group having negative refractive power and comprising a waist (constriction) with a minimum diameter of the propagating radiation, and a further lens arrangement with positive refractive power, which follows the second lens group, wherein at least one lens of the projection lens system which is arranged in front of the waist comprises an aspherical surface.

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