Optical probes with spacing sensors for the wafer level...

Details Optical probes with spacing sensors for the wafer level... Optical probes with spacing sensors for the wafer level...

2007-02-27

2007-02-27

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754120, C324S750010

Reexamination Certificate

active

11015981

ABSTRACT:
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light to/from the top of the wafer. During the optical testing, the vertical spacing between an optical probe and the wafer is set to a very close distance, to achieve efficient optical coupling. It is beneficial to keep this close distance during optical testing as a constant in testing different optical components at different locations on the wafer. In one implementation, a spacing sensor may be used to measure the height of the optical probe from the wafer surface. This sensor may be a capacitance sensor that is mounted at the optical probe.

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