Optical probe having tapered wave guide and scanning near-field

Details Optical probe having tapered wave guide and scanning near-field Optical probe having tapered wave guide and scanning near-field

1997-03-21

2000-08-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3700

Patent

active

061040304

ABSTRACT:
An optical probe comprises a waveguide having an optical opening for passing light therethrough, the waveguide terminating in a sharp tip at a distal end thereof. A metal film is coated on the distal end of the waveguide except for the optical opening. The metal film has a curved surface gradually retreating from the optical opening to an outer circumference of the waveguide.

REFERENCES:
patent: 4604520 (1986-08-01), Pohl
patent: 4684206 (1987-08-01), Bednorz et al.
patent: 4725727 (1988-02-01), Harder et al.
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5353632 (1994-10-01), Nakagawa
patent: 5384464 (1995-01-01), De Fornel et al.

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