Optical microshutter array

Details Optical microshutter array Optical microshutter array

1997-01-24

1998-07-14

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359290, 359291, G02F 101

Patent

active

057813310

ABSTRACT:
An optical shutter apparatus includes a source of illumination and a first aperture plate positioned in a path of light from the source of illumination. A cantilever shutter is positioned at each aperture in the aperture plate and includes at least two bonded layers, one being an electrically resistive layer which exhibits a first thermal coefficient of expansion (TCE) and the second layer exhibiting a second TCE that is different from the first TCE. A proximal end of the bonded layers is attached to the aperture plate at each aperture and a distal portion thereof covers the respective aperture when in position thereover. A controller applies signals to the first electrically resistive layer to cause a heating of the first and second layers and a resultant unequal expansion thereof. The expansion causes a flexure of the cantilever shutter and moves the distal portion thereof to either cover or uncover the aperture, which, when uncovered, allows transmission of the illumination therethrough.

REFERENCES:
patent: 3463572 (1969-08-01), Preston, Jr.
patent: 3746785 (1973-07-01), Goodrich
patent: 4698602 (1987-10-01), Armitage
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 5424866 (1995-06-01), Kikinis
patent: 5659418 (1997-08-01), Yurke
IEEE Proceedings-Micro Electro Mechanical Systems, 1990, pp. 128-131, M. Parameswaran et al., "CMOS Electrothermal Microactuators".
IEEE Proceedings-Micro Electro Mechanical Systems, 1995, pp. 310-315, Terunobu Akiyama et al., "A Quantitive Analysis of Scratch Drive Actuator Using Buckling Motion".
IEEE Transactions on Electron Devices, vol. 35, No. 6, Jun. 1988, pp. 758-763, Werner Riethmuller et al., "Thermally Excited Silicon Microactuators".
The Eighth International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Jun. 1996, pp. 416-419, G. Lin et al., "Design, Fabrication, and Testing of a C-Shaped Actuator".
Symposium on Micromechanical Systems, DSC-vol. 40, 1992, pp. 13-23, E. Obermeier et al., "Electrostatically Activated Micro-Shutter In (110) Silicon".
Technical Digest-Solid-State Sensor and Actuator Workshop, Jun. 1996, pp. 191-195, Yongli Huang et al., "Piezoelectrically Actuated Microcantilever for Actuated Mirror Array Application".
Technical Digest-Solid-State Sensor and Actuator Workshop, Jun. 1996, pp. 31-35, Sun et al., "Lateral In-Plane Displacement Microactuators with Combined Thermal and Electrostatic Drive".
Late-News Poster Session Supplemental Digest-Solid-State Sensor and Actuator Workshop, Jun. 1996, pp. 1-2, R. K. Gupta et al., "Pull-In Dynamics of Electrostatically-Actuated Beams".

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