Optical method for integrated circuit bar identification

Details Optical method for integrated circuit bar identification Optical method for integrated circuit bar identification

1983-11-03

1986-02-25

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Vesicular process

430 22, 430292, 430311, 430945, 427 531, 427 8, G03C 536, H01L 2166

Patent

active

045728860

ABSTRACT:
A method for optically marking selected integrated circuit bars of visual identification. In one embodiment a layer for photosensitive material applied to a portion of all of the bars on a wafer prior to testing. Selected bars are marked by directing a beam of radiant energy at the photosensitive material, which changes opacity and/or color in the irradiated region.

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patent: 4348803 (1982-09-01), Sasaki
patent: 4400461 (1983-08-01), Chandross et al.
patent: 4425424 (1984-01-01), Altland et al.
patent: 4522656 (1985-06-01), Kuhn-Kuhnenfeld et al.

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