Optical layer for excimer laser

Details Optical layer for excimer laser Optical layer for excimer laser

1993-03-19

1995-04-18

Epps, Georgia Y.

Coherent light generators

Particular active media

Gas

359361, H01S 322

Patent

active

054084890

ABSTRACT:
An optical layer and arrangements with such a layer are proposed which is predominantly of Ta.sub.2 O.sub.5 and having an absorption constant for ultra-violet light less than 0.0075 for light of 308 nm. Such a layer is produced by ion-beam sputtering of a target which target is predominantly made of Ta.sub.2 O.sub.5.

REFERENCES:
patent: 4142958 (1979-03-01), Wei et al.
patent: 4556599 (1985-12-01), Sato et al.
patent: 4689794 (1987-08-01), Brosnan
patent: 4856019 (1989-08-01), Miyata et al.
patent: 5069968 (1991-12-01), Nietering
patent: 5089743 (1992-02-01), Okuda et al.
Absorption-influenced laser damage resistance of Ta205 coatings By Wolf, OPTCA ACTA, 1986, vol. 33, No. 7, 919-924.
CRC Handbook of Chemistry and Physics, 55th Edition 1974-1975 (no month).
Bergmann et al., Lehrbuchder Experimentalphysilew, vol. III, Optic, Ed. B. pp. 43-1 (1987) (no month available).
Effects of Oxygen Content on the optical Properties of Tantalum Oxide . . . , by Demiryont, Applied Optics/vol. 24, No. 4/15 Feb. 1985.
Technology and applications of broad-beam ion sources in sputtering Part II. Applications; by Harper, J.Vac.Sci. Technol., 21(3), Sep./Oct. 1982.
Optische Beschichtungen fur Hochleistungslaser Optical . . . Risiau Jun. 1989.
The Optical Properties of Thin Films of Tantalum Pentoxide Zirconium Dioxide, Khawaja, Jun. 13, 1975.
Journal of the Electrochemical Society, Selected Properties of Pyrolytic Ta205 Films, Knausenberger, Jul. 1973.
Materials for Optical Coatings in the Ultraviolet; by Rainer, Applied Optics/vol. 24, No. 4/15 Feb. 1985.

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