Optical interferometric pressure sensor

Details Optical interferometric pressure sensor Optical interferometric pressure sensor

2007-12-11

2007-12-11

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Combined

C073S718000

Reexamination Certificate

active

11497226

ABSTRACT:
A vacuum measuring cell has a first housing body and a membrane, both of Al2O3ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

REFERENCES:
patent: 5188780 (1993-02-01), Lange et al.
patent: 5315877 (1994-05-01), Park et al.
patent: 5436795 (1995-07-01), Bishop et al.
patent: 6017645 (2000-01-01), Tailhades et al.
patent: 6528008 (2003-03-01), Bjoerkman
patent: 6591687 (2003-07-01), Bjoerkman et al.
patent: 7107855 (2006-09-01), Bjoerkman
patent: 7140085 (2006-11-01), Bjoerkman et al.
patent: 2003/0118802 (2003-06-01), Bjoerkman
patent: 2004/0012942 (2004-01-01), Bjoerkman et al.

Affiliated with

Also associated with

Rating

Optical interferometric pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical interferometric pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical interferometric pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3850427