Optical inspection tool having lens unit with multiple beam...

Details Optical inspection tool having lens unit with multiple beam... Optical inspection tool having lens unit with multiple beam...

2006-06-12

2010-06-01

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237300

Reexamination Certificate

active

07728966

ABSTRACT:
An optical inspection tool used to detect surface defects of a substrate include a chuck for holding a substrate and a lens unit disposed over the chuck. The lens unit includes at least a pair of oblique beam paths therein, wherein light penetrating the beam paths travels without angular deflection. The beam paths take the form of spaces formed through the lens unit, or flat portions formed on a lens within the lens unit. A camera is installed on the lens unit, and the camera converts light passing through the lens unit into an image. Methods of detecting surface defects of the substrate using the inspection tool are also provided.

REFERENCES:
patent: 4679937 (1987-07-01), Cain et al.
patent: 5428442 (1995-06-01), Lin et al.
patent: 5631733 (1997-05-01), Henley
patent: 5909276 (1999-06-01), Kinney et al.
patent: 2002/0180959 (2002-12-01), Nakajima et al.
patent: 09-033446 (1997-02-01), None
patent: 08-233747 (1999-09-01), None
English language abstract of Japanese Publication No. 08-233747.
English language abstract of Japanese Publication No. 09-033446.

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