Optical inspection of a specimen using multi-channel responses f

Details Optical inspection of a specimen using multi-channel responses f Optical inspection of a specimen using multi-channel responses f

1997-06-27

1998-10-13

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356239, 356394, 25055939, 25055941, 25055946, G01N 2100, G01N 2186, G01B 1100

Patent

active

058220550

ABSTRACT:
A method and inspection system to inspect a first pattern on a specimen for defects against a second pattern that is intended to be the same where the second pattern has known responses to at least one probe. The inspection is performed by applying at least one probe to a point of the first pattern on the specimen to generate at least two responses from the specimen. Then the first and second responses are detected from the first pattern, and each of those responses is then compared with the corresponding response from the same point of the second pattern to develop first and second response difference signals. Those first and second response difference signals are then processed together to unilaterally determine a first pattern defect list.

REFERENCES:
patent: 4595789 (1986-06-01), Feldman et al.
patent: 4806774 (1989-02-01), Lin et al.
patent: 5058178 (1991-10-01), Ray
patent: 5153668 (1992-10-01), Katzir et al.
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5276498 (1994-01-01), Galbraith et al.
patent: 5278012 (1994-01-01), Yamanaka et al.
patent: 5293538 (1994-03-01), Iwata et al.
patent: 5455870 (1995-10-01), Sepai et al.
patent: 5506676 (1996-04-01), Hendler et al.
"Automating Inspection of Aluminum Circuit Pattern of LSI Wafters", Yasuhiko Hara, Electronics and Communications in Japan, vol. 70, No. 3 (1987) pp. 46-59.

Affiliated with

Also associated with

Rating

Optical inspection of a specimen using multi-channel responses f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical inspection of a specimen using multi-channel responses f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical inspection of a specimen using multi-channel responses f will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-318590