Image analysis – Applications – Manufacturing or product inspection
Patent
1997-12-03
1999-11-09
Johns, Andrew W.
Image analysis
Applications
Manufacturing or product inspection
382270, 382318, G06K 900
Patent
active
059829214
ABSTRACT:
A method and apparatus for inspecting the surface of articles, such as chips and wafers, for defects, includes a first phase of optically examining the complete surface of the article inspected at a relatively high speed and with a relatively low spatial resolution, and a second phase of optically examining with a relatively high spatial resolution only the suspected locations for the presence or absence of a defect therein.
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Alumot David
Neumann Gad
Sherman Rivka
Tirosh Ehud
Applied Materials Inc.
Bach Joseph
Johns Andrew W.
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