Optical element holder and projection exposure apparatus...

Details Optical element holder and projection exposure apparatus... Optical element holder and projection exposure apparatus...

2006-06-13

2008-11-25

Martinez, Joseph (Department: 2873)

Optical: systems and elements

Lens

With support

C359S236000, C359S508000, C355S071000, C362S277000

Reexamination Certificate

active

07457058

ABSTRACT:
In an optical member holder and a projection exposure apparatus having the same, a light beam radiated from a light source may be formed into light having a desired shape by selecting one of a plurality of optical elements. An optical element holder may include a support member to support the plurality of optical elements, a first driving section to move or rotate the support member to select one of the optical elements, and a second driving section to rotate the selected optical element to adjust an arrangement direction thereof. The light formed by the selected optical element may be directed through a reticle.

REFERENCES:
patent: 6388736 (2002-05-01), Smith et al.
patent: 2004/0239904 (2004-12-01), Nishinaga
patent: 2004/0263977 (2004-12-01), Toyoda et al.
patent: 2003-178951 (2003-06-01), None
patent: 10-2005-0002310 (2005-01-01), None
patent: 10-2005-0012031 (2005-01-01), None

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