Optical element deformation system

Details Optical element deformation system Optical element deformation system

2005-01-18

2005-01-18

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S290000, C359S846000

Reexamination Certificate

active

06844994

ABSTRACT:
In a system for specific deformation of optical elements in an imaging device, in particular in a projection exposure machine having a projection lens for micro-lithography, for the purpose of eliminating image errors or for active adjustment, piezoelectric elements are applied as actuators in the form of thin plates, films or layers to surfaces to be deformed, or integrated into them. In conjunction with an adaptronic servo loop having sensors, forces and/or moments are exerted on the optical elements for their specific deformation by means of a controlled activation of the piezoelectric elements as actuators.

REFERENCES:
patent: 4202605 (1980-05-01), Heinz
patent: 5026977 (1991-06-01), Hubbard, Jr.
patent: 5428482 (1995-06-01), Bruning et al.
patent: 5719846 (1998-02-01), Matoba et al.
patent: 5986795 (1999-11-01), Chapman et al.
patent: 6411426 (2002-06-01), Meehan et al.
patent: 6496466 (2002-12-01), Lee et al.
patent: 6566627 (2003-05-01), Brandinger et al.
patent: 6585379 (2003-07-01), Yokoyama et al.
patent: 371906 (1963-10-01), None
patent: 3406907 A 1 (1984-10-01), None
patent: 198 25 716 A 1 (1999-12-01), None
patent: 199 10 947 A 1 (2000-09-01), None
patent: 0 053 463 (1982-06-01), None
patent: 0 230 277 (1987-07-01), None
patent: 0 964 281 (1999-12-01), None
patent: 1 209 500 (2002-05-01), None
patent: WO 9709642 (1997-03-01), None
patent: WO 9734171 (1997-09-01), None

Affiliated with

Also associated with

Rating

Optical element deformation system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical element deformation system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical element deformation system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3376972