Optical disk master, optical disk substrate stamper, process...

Details Optical disk master, optical disk substrate stamper, process... Optical disk master, optical disk substrate stamper, process...

2006-09-05

2006-09-05

Chea, Thorl (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S270110, C430S330000

Reexamination Certificate

active

07101656

ABSTRACT:
A process for producing an optical disk master, comprises the steps of forming a photoresist layer on a glass master, cutting the photoresist layer by projecting light beam onto the glass master having the photoresist layer thereon to expose the photoresist layer to light, developing the photoresist layer after the cutting step to form a hollow portion corresponding to the light-exposed portion, and carrying out an ion treatment by projecting ions onto the developed photoresist layer to decrease the thickness of the photoresist layer at the developed hollow portion to reach the prescribed depth by the ion-treatment.

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patent: 2001243665 (2001-09-01), None

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