Optical diffraction method and apparatus for integrated circuit

Details Optical diffraction method and apparatus for integrated circuit Optical diffraction method and apparatus for integrated circuit

1996-01-24

1997-09-02

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With object being compared and light beam moved relative to...

356237, 2502376, G01B 1100, G01N 2100

Patent

active

056637993

ABSTRACT:
A technique for detecting damage of leads arranged in a generally parallel periodic pattern, includes the following steps: directing a coherent light beam at a plurality of adjacent leads; detecting an image at a distance from the leads at which the light beam would form a diffraction image having substantially uniform intensity when the leads form a substantially uniform pattern; moving the pattern of leads and the light beam with respect to each other; and detecting damage of leads from variation in intensity of the detected image.

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