Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-11-10
2009-10-20
Vanore, David A. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S365000, C250S372000, C355S037000, C359S216100, C359S633000
Reexamination Certificate
active
07605386
ABSTRACT:
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical element with at least one second raster element, where the second raster element has a second axis. The first raster element can be changed in its position relative to the second raster element, so that a distance between the first axis and the second axis is variable.
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Deguenther Markus
Kuerz Birgit
Menke Christoph
Singer Wolfgang
Wangler Johannes
Carl Zeiss SMT AG
Ohlandt Greeley Ruggiero & Perle L.L.P.
Vanore David A.
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