Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2006-09-12
2006-09-12
Louie, Wai-Sing (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S108000, C257S428000
Reexamination Certificate
active
07105902
ABSTRACT:
An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.
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patent: 6181460 (2001-01-01), Tran et al.
patent: 6690850 (2004-02-01), Greywall
patent: 2002/0114053 (2002-08-01), Yasuda et al.
patent: A-H10-270719 (1998-10-01), None
patent: 2002-341264 (2002-11-01), None
Asami Kazushi
Kano Kazuhiko
Shioka Tetsuo Y
Denso Corporation
Louie Wai-Sing
Posz Law Group , PLC
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