Optical device having movable portion and method for...

Details Optical device having movable portion and method for... Optical device having movable portion and method for...

2006-09-12

2006-09-12

Louie, Wai-Sing (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S108000, C257S428000

Reexamination Certificate

active

07105902

ABSTRACT:
An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.

REFERENCES:
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6026617 (2000-02-01), Stark
patent: 6181460 (2001-01-01), Tran et al.
patent: 6690850 (2004-02-01), Greywall
patent: 2002/0114053 (2002-08-01), Yasuda et al.
patent: A-H10-270719 (1998-10-01), None
patent: 2002-341264 (2002-11-01), None

Affiliated with

Also associated with

Rating

Optical device having movable portion and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical device having movable portion and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical device having movable portion and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3560350