Optical device having movable portion and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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C257S108000, C257S428000

Reexamination Certificate

active

07105902

ABSTRACT:
An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.

REFERENCES:
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6026617 (2000-02-01), Stark
patent: 6181460 (2001-01-01), Tran et al.
patent: 6690850 (2004-02-01), Greywall
patent: 2002/0114053 (2002-08-01), Yasuda et al.
patent: A-H10-270719 (1998-10-01), None
patent: 2002-341264 (2002-11-01), None

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