Optical device and method for manufacturing the same

Details Optical device and method for manufacturing the same Optical device and method for manufacturing the same

2006-08-31

2008-10-14

Connelly-Cushwa, M. R. (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S013000, C359S573000

Reexamination Certificate

active

07437036

ABSTRACT:
A method for manufacturing an optical device is provided. The device includes an optical waveguide path having a Bragg grating and a movable portion disposed near the Bragg grating. A displacement of the movable portion provides a change of spacing of the Bragg grating so that a light passing through the optical waveguide path is changed. The optical device detects the physical quantity based on a change of the light. The method includes steps of: forming the optical waveguide path with the Bragg grating on a first part of a silicon substrate; and forming the movable portion on a second part of the silicon substrate.

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