Optical coupling apparatus for a dual column charged...

Details Optical coupling apparatus for a dual column charged... Optical coupling apparatus for a dual column charged...

2005-09-08

2009-11-03

Sohn, Seung C (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S3960ML, C356S369000, C356S493000, C356S507000

Reexamination Certificate

active

07612321

ABSTRACT:
An optical coupling apparatus for a dual column charged particle beam tool allowing both optical imaging of an area of an integrated circuit, as well as localized heating of the integrated circuit to form silicide. In one embodiment, optical paths from a whitelight source and a laser source are coupled together by way of first and second beam splitters so that a single optical port of the dual column tool may be utilized for both imaging and heating. In another embodiment, a single laser source is employed to provide both illumination for standard microscopy-type imaging, as well as localized heating. In a third embodiment, a single laser source provides heating along with localized illumination for confocal scanning microscopy-type imaging.

REFERENCES:
patent: 6181474 (2001-01-01), Ouderkirk et al.
patent: 6590667 (2003-07-01), Lee et al.
patent: 7045791 (2006-05-01), Benas-Sayag et al.

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