Optical composite material and method for its production

Details Optical composite material and method for its production Optical composite material and method for its production

2011-03-15

2011-03-15

Group, Karl E (Department: 1731)

Optical: systems and elements

Lens

With field curvature shaping

C359S656000, C501S032000, C501S004000, C428S426000, C428S432000

Reexamination Certificate

active

07907347

ABSTRACT:
An optical composite material comprises an amorphous optical material (6) with a first refractive index (na), into which crystalline nanoparticles (7) having a second, higher refractive index (nn) are embedded, wherein the amorphous material (6) and the nanoparticles (7) are resistant to UV radiation. A microlithography projection exposure apparatus comprises a projection objective (2) with at least one optical element (3) which is, in particular, operated in transmission and consists of an optical composite material of this type. In a method for producing the optical composite material, crystalline nanoparticles are introduced into the amorphous optical material during flame deposition in a soot or direct process.

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