Optical component that includes a material having a thermal...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

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C355S053000, C355S067000, C355S071000, C378S034000, C378S035000

Reexamination Certificate

active

07428037

ABSTRACT:
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature T0that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.

REFERENCES:
patent: 2326056 (1943-08-01), Nadeau et al.
patent: 2326059 (1943-08-01), Nordberg
patent: 4422725 (1983-12-01), Prewo
patent: 5265143 (1993-11-01), Early et al.
patent: 5322559 (1994-06-01), Sleight
patent: 6228512 (2001-05-01), Bajt et al.
patent: 6353470 (2002-03-01), Dinger
patent: 6747730 (2004-06-01), Box
patent: 2004/0165173 (2004-08-01), Box
patent: 0955565 (1999-11-01), None
patent: A 1123195 (2001-08-01), None
patent: WO2004089838 (2004-10-01), None
Dinger, U. et al., “Mirror Substrates for EUV-Lithography: Progress In Metrology and Optical Fabrication Technology,” Proceedings of the SPIE, SPIE, Bellingham, VA, US, vol. 4146, pp. 35-46, Aug. 2000.
“Optics Guide 3,” Optics Guide, Melles Griot, Irvinge, CA, US, pp. 68 and 177, 1985.
Schultz, P.C., et al., “Ultra low expansion glasses and their structure in the SiO2-TiO2-System,” Amorphous Materials, pp. 453-461, Sep. 1970.

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