Optical component and coating system for coating substrates...

Details Optical component and coating system for coating substrates... Optical component and coating system for coating substrates...

2006-08-22

2006-08-22

Schwartz, Jordan M. (Department: 2873)

Optics: eye examining, vision testing and correcting

Spectacles and eyeglasses

Ophthalmic lenses or blanks

C351S159000

Reexamination Certificate

active

07093937

ABSTRACT:
An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (β max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.

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patent: WO 99/46421 (1999-09-01), None
Harry Bauer, et al., “Optical Coatings for UV Photolithography Systems”, SPIE, vol. 2776 (Aug. 1996), pp. 353-365.

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