Optical circuit in which fabrication is easy

Details Optical circuit in which fabrication is easy Optical circuit in which fabrication is easy

2007-07-10

2007-07-10

Bovernick, Rodney (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S014000

Reexamination Certificate

active

10681019

ABSTRACT:
In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.

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