Optical apparatus and exposure apparatus incorporating the...

Details Optical apparatus and exposure apparatus incorporating the... Optical apparatus and exposure apparatus incorporating the...

2005-11-01

2005-11-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

Reexamination Certificate

active

06961114

ABSTRACT:
An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements.

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patent: 6333775 (2001-12-01), Haney et al.
patent: 62-286226 (1987-12-01), None
Search Report from related EP application EP 99 91 0730 dated Mar. 8, 2005.

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