Optical analysis of integrated circuits

Details Optical analysis of integrated circuits Optical analysis of integrated circuits

2006-03-28

2006-03-28

Wael, Fahmy (Department: 2814)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Using radiant energy

C324S750010, C324S754120, C324S501000, C250S341400

Reexamination Certificate

active

07019511

ABSTRACT:
The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.

REFERENCES:
patent: 5381421 (1995-01-01), Dickol et al.
patent: 5999006 (1999-12-01), Kikuchi
patent: 6072179 (2000-06-01), Paniccia et al.

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