Optical alignment of superpositioned objects

Details Optical alignment of superpositioned objects Optical alignment of superpositioned objects

1995-06-07

2001-09-25

Font, Frank G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With light detector

C348S087000

Reexamination Certificate

active

06295128

ABSTRACT:

FIELD OF THE INVENTION
The invention is in the field of tools for use in the manufacturing of electronic apparatus in sizes that are smaller than the normal positioning tolerances in the art and in particular to the alignment of objects in locations with difficult accessability.
BACKGROUND OF THE INVENTION
In the fabrication of electronic apparatus downsizing efforts have reached a level that objects that are not rigid, are temperature sensitive and which have connections that are spaced at a pitch so close that the connections are at less than normal positioning tolerances and which are located in difficult locations must be assembled into an operational apparatus.
An illustration of such a situation is present in an aspect of the evolving technology of flat panel displays, known in the art as active matrix technology. In the active matrix type technology in essence semiconductor switching and amplification is provided at each pixel of the display raster mounted in a translucent assembly. An illustration of a manufacturing process in the active matrix technology is described in the technical article titled “active Matrix Liquid Crystal Displays, Part 1, Manufacturing Process” by William C. O'Mara in the Journal “Solid State Technology”, December 1991, Pages 65-70. The liquid crystals themselves and the driving circuits therefor are described in the technical article titled “Liquid Crystals for Active Matrix Displays”, by H. Plach et al, in the Journal “Solid State Technology”, June 1992, Pages 186-193.
In technologies where there are fine pitch connections that have to be made at high precision in marginally accessible locations there is a need for tooling that will facilitate the fabrication operations.
SUMMARY OF THE INVENTION
The invention is a tooling principle, wherein, the reflecting properties of the faces of superimposed objects are employed in establishing superposition alignment and relative position of the objects. Angular directed optical magnification is used to define superpositioning in alignment of superimposed contacts in difficult accessability locations such as fine periodicity pads or conductors between optically opaque substrates. Contact pads, deposited to a periodicity of less than 100 micrometers on one side of a flex tape and on an opposing surface of a semiconductor chip are placed in superimposed alignment using angled microscope reflection observation for alignment.


REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 5194948 (1993-03-01), L'Esperance, III et al.
O'Mara, W.C., “Active Matrix Liquid Crystal Displays-Part 1: Manufacturing Process”, Solid State Technology, Dec. 1991, pp. 65-70.
Plach,et al, “Liquid Crystals for Active Matrix Displays”, Solid State Technology, Jun. 1992, pp. 186-193.

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