Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-05-03
2005-05-03
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S023000, C700S100000, C700S218000
Reexamination Certificate
active
06889110
ABSTRACT:
A scheduler handles the various tasks to be performed on a wafer processing system as operations, with each operation having a predefined data structure. Operations that meet a set of requirements are added to an operation list. In the operation list, operations meeting another set of requirements are switched to the active state. Each active operation in the operation list is scheduled to run on the wafer processing system. Using structured operations to perform various tasks improves the extensibility and maintainability of the present scheduler. Further, the present scheduler can schedule several compatible operations at the same time by going through each operation in the operation list, and running those that are in the active state.
REFERENCES:
patent: 5024570 (1991-06-01), Kiriseko et al.
patent: 5751580 (1998-05-01), Chi
patent: 6101419 (2000-08-01), Kennedy et al.
patent: 6122566 (2000-09-01), Nguyen et al.
patent: 6201998 (2001-03-01), Lin et al.
patent: 6201999 (2001-03-01), Jevtic
patent: 6374144 (2002-04-01), Viviani et al.
patent: 6397111 (2002-05-01), Niwa
patent: 6560507 (2003-05-01), Malitsky et al.
patent: 6665584 (2003-12-01), Malitsky et al.
Hentschel Thomas
Jain Jaideep
Liu Stanley P.
Malitsky Sofya B.
Wong Eileen A. H.
Lee Douglas S.
Novellus Systems Inc.
Okamoto & Benedicto LLP
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