4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

Stanley P. Liu

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Module classification approach for moving semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Module classification approach for moving semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Operational lists for simultaneous wafer scheduling and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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