Operating method of vacuum processing system and vacuum...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S021000, C700S108000, C700S109000, C700S110000, C702S128000, C702S185000, C702S035000, C414S939000, C414S940000, C414S935000, C438S905000, C029S025010

Reexamination Certificate

active

06853872

ABSTRACT:
A vacuum processing method and apparatus processing units for conducting processing, a transfer processing unit connected with the plurality of processing units for carrying wafers, and a control unit for controlling the processing units. A processing order information storing device stores a processing order of the wafers for the processing units, an operational information signal generating device generates an operational information signal indicating an operable or inoperable state of each of the processing units, an operational information signal storing device stores the operational information signal indicating the state of each of the processing units, and a control device matches and processes the processing order information and the operational information signal, and continues operation without using an inoperable processing unit while using other operable processing units.

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