Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-04-26
2005-04-26
Knight, Anthony (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S021000, C700S108000, C700S109000, C700S110000, C702S128000, C702S185000, C702S035000, C414S939000, C414S940000, C438S905000
Reexamination Certificate
active
06885906
ABSTRACT:
A vacuum processing method and apparatus having one cassette containing wafers which are to be transferred in a preset transferring order to a processing unit via a transfer unit, and another cassette containing wafers to be processed on an emergency basis. Automatic control of processing a wafer from the one cassette is effected, and in response to a request for emergency processing of a water of the another cassette, the automatic processing control of the one wafer from the one cassette is temporarily stopped while completing processing of the wafer of the one cassette returning the same to the one cassette. Emergency processing is initiated by transferring a wafer from the another cassette to the vacuum processing unit via the transfer unit. The processing of the emergency wafer is completed and the processed emergency wafer is returned to the another cassette.
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Ikuhara Shoji
Joo Kazuhiro
Nishihata Kouji
Okiguchi Shoji
Tahara Tetsuya
Antonelli Terry Stout & Kraus LLP
Knight Anthony
Pham Thomas
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