Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-09-06
2005-09-06
Knight, Anthony (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S021000, C700S108000, C700S109000, C700S110000, C702S128000, C702S185000, C702S035000, C414S939000, C414S940000, C414S935000, C438S905000, C029S025010
Reexamination Certificate
active
06941185
ABSTRACT:
A vacuum processing apparatus and method wherein a plurality of processing units are for conducting processing, a transfer processing unit is connected with the plurality of processing units for carrying wafers to the processing units, a transfer device is disposed in the transfer processing unit and carries the wafers and cassettes for containing the wafers, and a control unit is provided for conducting transfer control for transferring the wafers from respective cassettes to the transfer processing unit. The wafers are processed by using the plural processing units, and at least two of the cassettes are used. Parallel processing is conducted of applying same processing to the wafers contained on each of the cassettes by applying the same recipe and the wafers, after applying the parallel processing, are returned to the original cassette.
REFERENCES:
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5076205 (1991-12-01), Vowles et al.
patent: 5314509 (1994-05-01), Kato et al.
patent: 5616208 (1997-04-01), Lee
patent: 5685684 (1997-11-01), Kato et al.
patent: 5795356 (1998-08-01), Leveen
patent: 5817366 (1998-10-01), Arai et al.
patent: 63-57734 (1988-04-01), None
patent: 3-257945 (1991-11-01), None
patent: 3-274746 (1991-12-01), None
patent: A-07-326649 (1995-12-01), None
patent: A-07-335711 (1995-12-01), None
patent: 8-181184 (1996-07-01), None
patent: 9-017838 (1997-01-01), None
patent: 9-050948 (1997-02-01), None
patent: A-09-064142 (1997-03-01), None
patent: 9-159981 (1997-06-01), None
Ikuhara Shoji
Joo Kazuhiro
Nishihata Kouji
Okiguchi Shoji
Tahara Tetsuya
Antonelli Terry Stout & Kraus LLP
Knight Anthony
Pham Thomas
LandOfFree
Operating method of vacuum processing system and vacuum... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Operating method of vacuum processing system and vacuum..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Operating method of vacuum processing system and vacuum... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3394461