Opaque low resistivity silicon carbide

Details Opaque low resistivity silicon carbide Opaque low resistivity silicon carbide

2005-03-29

2005-03-29

Abraham, Fetsum (Department: 2826)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

Amorphous semiconductor

C438S381000, C438S478000

Reexamination Certificate

active

06872637

ABSTRACT:
An opaque, low resistivity silicon carbide and a method of making the opaque, low resistivity silicon carbide. The opaque, low resistivity silicon carbide is a free-standing bulk material that may be machined to form furniture used for holding semi-conductor wafers during processing of the wafers. The opaque, low resistivity silicon carbide is opaque at wavelengths of light where semi-conductor wafers are processed. Such opaqueness provides for improved semi-conductor wafer manufacturing. Edge rings fashioned from the opaque, low resistivity silicon carbide can be employed in RTP chambers.

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