On-wafer method and apparatus for pre-processing...

Details On-wafer method and apparatus for pre-processing... On-wafer method and apparatus for pre-processing...

2007-01-30

2007-01-30

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Statistical measurement

C702S117000, C702S183000, C324S765010

Reexamination Certificate

active

11109092

ABSTRACT:
An on-wafer method and apparatus for preprocessing measurements of process and environment-dependent circuit performance variables provides new techniques for yield/performance test and analysis. An on-wafer circuit calculates the sums of multiple exponentiations of outputs of one or more measurement circuits, thereby reducing the amount of data that must be transferred from the wafer without losing information valuable to the analysis. An integer scaling of the input data is arranged between zero and unity so that the exponentiations all similarly lie between zero and unity. Measurement value ranges are determined by capturing extreme values using comparators as the measurements are input.

REFERENCES:
patent: 4021656 (1977-05-01), Caudel et al.
patent: 4357703 (1982-11-01), Van Brunt
patent: 6704895 (2004-03-01), Swoboda et al.

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