Coherent light generators – Particular resonant cavity
Reexamination Certificate
2005-01-04
2005-01-04
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular resonant cavity
C356S417000, C250S458100
Reexamination Certificate
active
06839375
ABSTRACT:
Some of the key optical components of lithography lasers are very sensitive to intensive UV radiation. Intensive UV radiation can cause color center formation in these components. The color centers are reason for laser energy dropping, worse laser-bandwidth and limited life-time. The on-line monitoring of the color-center formation during operation of the lithography lasers detecting laser induced fluorescence and investigation of the fluorescence spectrum can be helpful for maintenance of lithography lasers. The fluorescence signal is analyzed and delivers information about optics quality.
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Lokai Peter
Seddighi Farid
Harvey Minsun Oh
Lambda Physik AG
Nguyen Phillip
Stallman & Pollock LLP
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