On-chip capacitor structure

Details On-chip capacitor structure On-chip capacitor structure

1998-07-29

2000-03-14

Wojciechowicz, Edward

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257306, 257309, 257379, 257532, 438396, 438399, H01L 2972

Patent

active

06037621&

ABSTRACT:
An on-chip capacitor structure comprising a lower metal layer and an upper metal layer; an array of metal islands disposed between the lower and the upper metal layers; each island of the array of islands being electrically connected to either the lower layer or the upper layer such that no two adjacent islands are connected to the same layer.

REFERENCES:
patent: 5917230 (1999-06-01), Aldrich
Fractal Capacitors, H. Samavati, et al., 1998 ISSCC, Sesion 16, TD: Advanced Radio-Frequency Circuits, Paper FP 16.6, 256-57.

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