On-chip capacitor

Details On-chip capacitor On-chip capacitor

2005-05-24

2005-05-24

Pham, Hoai (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S307000, C438S253000

Reexamination Certificate

active

06897505

ABSTRACT:
An on-chip analog capacitor. Metal interconnect structures are used to form the capacitor, and the interdigitated fingers of like polarity within the interconnect structure are connected above and below to one another by metal vias to form a wall of metal which increases total capacitance by taking advantage of the via sidewall capacitance.

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