Offset trimming for a micromachined sensing device

Details Offset trimming for a micromachined sensing device Offset trimming for a micromachined sensing device

1996-03-15

1997-08-19

Tran, Toan

Miscellaneous active electrical nonlinear devices, circuits, and

Signal converting, shaping, or generating

Amplitude control

327111, H03L 500

Patent

active

056592620

ABSTRACT:
A micromachined device has first, second, and third electrodes forming a differential capacitor, and first and second drivers for providing clocked signals to the first and second electrodes. The drivers each have supply leads coupled to first and second reference voltage supplies via fixed first and second resistors, and also coupled together with variable resistors for trimming an offset so that electrostatic forces are balanced.

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patent: 5343766 (1994-09-01), Lee
patent: 5345824 (1994-09-01), Sherman et al.
Analog Devices, Inc., 1995, Rev. 0, "+1g to +5g Single Chip Accelerometer With Signal Conditioning" ADXLO5*.
Analog Devices, Inc., Rev. A, "Monolithic Accelerometer With Signal Conditioning" ADXL50*.

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