Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2006-08-22
2006-08-22
Morgan, Eileen P. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S041000, C451S443000
Reexamination Certificate
active
07094134
ABSTRACT:
An off-line tool for breaking in pad conditioning disks used in a chemical mechanical polishing (CMP) system. The off-line tool comprises a platen having a first surface for holding a polishing pad and a motor for rotating the polishing pad. The motor is coupled to the platen via a first drive shaft. The off-line tool further comprises a mechanical drive assembly for holding a second drive shaft in a position proximate the first surface of the platen and a first break-in head removably attached to the second drive shaft. The first break-in head receives a first pad conditioning disk and the second drive shaft moves the first break-in head toward the platen, thereby pressing the first pad conditioning disk against the polishing pad on the platen.
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Morgan Eileen P.
Samsung Austin Semiconductor, L.P.
Samsung Electronics Co,. Ltd.
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