Off-line tool for breaking in multiple pad conditioning...

Abrading – Abrading process – With tool treating or forming

Reexamination Certificate

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C451S041000, C451S443000

Reexamination Certificate

active

07094134

ABSTRACT:
An off-line tool for breaking in pad conditioning disks used in a chemical mechanical polishing (CMP) system. The off-line tool comprises a platen having a first surface for holding a polishing pad and a motor for rotating the polishing pad. The motor is coupled to the platen via a first drive shaft. The off-line tool further comprises a mechanical drive assembly for holding a second drive shaft in a position proximate the first surface of the platen and a first break-in head removably attached to the second drive shaft. The first break-in head receives a first pad conditioning disk and the second drive shaft moves the first break-in head toward the platen, thereby pressing the first pad conditioning disk against the polishing pad on the platen.

REFERENCES:
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patent: 6695680 (2004-02-01), Choi et al.
patent: 6695684 (2004-02-01), Park et al.
patent: 6769972 (2004-08-01), Huang et al.
patent: 6783445 (2004-08-01), Torii et al.
patent: 6796885 (2004-09-01), Vanell
patent: 6806193 (2004-10-01), Korthuis et al.
patent: 6837773 (2005-01-01), Brunelli
patent: 6840840 (2005-01-01), Moore

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