Off-axis projection optical system and extreme ultraviolet...

Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path

Reexamination Certificate

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C359S859000, C355S053000

Reexamination Certificate

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11453775

ABSTRACT:
Example embodiments are directed to an off-axis projection optical system including first and second mirrors that are off-axially arranged. The tangential and sagittal radii of curvature of the first mirror may be R1tand R1s, respectively. The tangential and sagittal radii of curvature of the second mirror may be R2tand R2s, respectively. The incident angle of the beam from an object point to the first mirror10may be i1, and an incident angle of the beam reflected from the first mirror10to the second mirror30is i2. The values of R1t, R1s, R2t, R2s, i1and i2may satisfy the following Equationin-line-formulae description="In-line Formulae" end="lead"?R1tcos i1=R2tcos i2in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?R1s=R1tcos2i1in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?R2s=R2tcos2i2.in-line-formulae description="In-line Formulae" end="tail"?

REFERENCES:
patent: 5805365 (1998-09-01), Sweatt
patent: WO 2004/010200 (2004-01-01), None

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