Objective with lenses made of a crystalline material

Details Objective with lenses made of a crystalline material Objective with lenses made of a crystalline material

2005-01-11

2005-01-11

Epps, Georgia (Department: 2873)

Optical: systems and elements

Polarization without modulation

By relatively adjustable superimposed or in series polarizers

C359S490020, C264S001210, C117S002000

Reexamination Certificate

active

06842284

ABSTRACT:
An objective (1), in particular for a microlithography projection apparatus, has lenses or lens parts falling into at least two groups. The first group (3) is made of a first crystalline material and the second group (5) is made of a second crystalline material. In the first group (3), an outermost aperture ray (15) is subject to a first optical path difference between two mutually orthogonal states of linear polarization; and the same outermost aperture ray is subject to a second optical path difference in the second group (5). The two different crystalline materials are selected so that the first and second optical path difference approximately compensate each other. A suitable selection consists of calcium fluoride for the first and barium fluoride for the second crystalline material.

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