Objective with birefringent lenses

Details Objective with birefringent lenses Objective with birefringent lenses

2006-01-31

2006-01-31

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

Microscope objective

C359S649000

Reexamination Certificate

active

06992834

ABSTRACT:
Objective (1, 601), in particular a projection objective for a microlithography projection apparatus, with first birefringent lenses (L108, L109, L129, L130) and with second birefringent lenses (L101–L107, L110–L128). The first lenses (L108, L109, L129, L130) are distinguished from the second lenses (L101–L107, L110–L128) by the lens material used or by the material orientation. After passing through the first lenses (L108, L109, L129, L130) and the second lenses (L101–L107, L110–L128), an outer aperture ray (5, 7) and a principal ray (9) are subject to optical path differences for two mutually orthogonal states of polarization. The difference between these optical path differences is smaller than 25% of the working wavelength. In at least one first lens (L129, L130), the aperture angle of the outer aperture ray (5, 7) is at least 70% of the largest aperture angle occurring for said aperture ray in all of the first lenses (L108, L109, L129, L130) and second lenses (L101–L107, L110–L128). This arrangement has the result that the first lenses (L108, L109, L129, L130) have a combined material volume of no more than 20% of the combined total material volume of the first lenses (L108, L109, L129, L130) and second lenses (L101–L107, L110–L128).

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patent: 1 235 092 (2002-08-01), None
patent: 1 237 043 (2002-09-01), None
patent: WO 02/093209 (2002-11-01), None
Burnett, John et al. “Intrinsic birefringence in calcium fluoride and barium fluoride.” Physical Review B, 64:241102, pp. 1-4.
Burnett, John et al. “The trouble with calcium fluoride.” SPIE's OEMagazine, Mar. 2002, pp. 23-25.

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