Optical: systems and elements – Lens – With support
Reexamination Certificate
2006-10-17
2006-10-17
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Lens
With support
C359S872000
Reexamination Certificate
active
07123427
ABSTRACT:
The invention relates to an objective, particularly a projection objective for use in semiconductor lithography, comprising optical elements such as lenses (16) and mirrors (11a). According to the invention, at least a portion of the optical elements (16, 11a) is provided with a reflective surface outside of the optically active area serving as the reference surface (12) for a the optical element inside the objective (8).
REFERENCES:
patent: 3077958 (1963-02-01), Grimsey
patent: 3802781 (1974-04-01), Wright
patent: 3837125 (1974-09-01), Johnson
patent: 3879105 (1975-04-01), Broche et al.
patent: 3917385 (1975-11-01), Caswell
patent: 4038971 (1977-08-01), Bezborodko
patent: 4060315 (1977-11-01), Heinz
patent: 4092518 (1978-05-01), Merard
patent: 4162120 (1979-07-01), Moreno
patent: 4195913 (1980-04-01), Dourte et al.
patent: 4202605 (1980-05-01), Heinz
patent: 4226507 (1980-10-01), Fuschetto
patent: 4236296 (1980-12-01), Woolhouse et al.
patent: 4268122 (1981-05-01), Deshaw
patent: 4277141 (1981-07-01), Kleiber
patent: 4295710 (1981-10-01), Heinz
patent: 4348090 (1982-09-01), Iizuka
patent: 4380391 (1983-04-01), Buser et al.
patent: 4389115 (1983-06-01), Richter
patent: 4403421 (1983-09-01), Shepherd
patent: 4408874 (1983-10-01), Zinky et al.
patent: 4537473 (1985-08-01), Maschmeyer
patent: 4659225 (1987-04-01), Takahashi
patent: 4672439 (1987-06-01), Florence et al.
patent: 4674874 (1987-06-01), Halldorsson et al.
patent: 4705369 (1987-11-01), Humpal
patent: 4710276 (1987-12-01), Kull
patent: 4722592 (1988-02-01), Stolfi
patent: 4740276 (1988-04-01), Marmo et al.
patent: 4826304 (1989-05-01), Guch et al.
patent: 4849668 (1989-07-01), Crawley et al.
patent: 4865454 (1989-09-01), Lazzarini et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 4932770 (1990-06-01), Caravaty
patent: 4932778 (1990-06-01), Parra
patent: 4953965 (1990-09-01), Iwase et al.
patent: 4959531 (1990-09-01), Marino
patent: 4967088 (1990-10-01), Stengl et al.
patent: 4969726 (1990-11-01), Koning
patent: 5025284 (1991-06-01), Komoriya et al.
patent: 5026977 (1991-06-01), Hubbard, Jr.
patent: 5074654 (1991-12-01), Alden et al.
patent: 5079414 (1992-01-01), Martin
patent: 5132979 (1992-07-01), Erbert
patent: 5157555 (1992-10-01), Reno
patent: 5204712 (1993-04-01), Bouwer et al.
patent: 5210650 (1993-05-01), O'Brien et al.
patent: 5339720 (1994-08-01), Pellarin et al.
patent: 5400184 (1995-03-01), Kuklo
patent: 5414557 (1995-05-01), Phillips
patent: 5428482 (1995-06-01), Bruning et al.
patent: 5438451 (1995-08-01), Schweizer
patent: 5485053 (1996-01-01), Baz
patent: 5529277 (1996-06-01), Ostaszewski
patent: 5537262 (1996-07-01), Aoki et al.
patent: 5642237 (1997-06-01), Miyawaki et al.
patent: 5694257 (1997-12-01), Arnone et al.
patent: 5719846 (1998-02-01), Matoba et al.
patent: 5724017 (1998-03-01), Pla et al.
patent: 5784355 (1998-07-01), Abe
patent: 5835284 (1998-11-01), Takahashi et al.
patent: 5870133 (1999-02-01), Naiki
patent: 5891317 (1999-04-01), Teichmann et al.
patent: 5894370 (1999-04-01), Okuda et al.
patent: 5973863 (1999-10-01), Hatasawa et al.
patent: 5986795 (1999-11-01), Chapman et al.
patent: 5986827 (1999-11-01), Hale
patent: 6054784 (2000-04-01), Sperling et al.
patent: 6108121 (2000-08-01), Mansell et al.
patent: 6144511 (2000-11-01), Umetsu et al.
patent: 6160628 (2000-12-01), Inoue
patent: 6166868 (2000-12-01), Holderer et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6229657 (2001-05-01), Holderer et al.
patent: 6246822 (2001-06-01), Kim et al.
patent: 6252334 (2001-06-01), Nye et al.
patent: 6252648 (2001-06-01), Hase et al.
patent: 6252712 (2001-06-01), Furter et al.
patent: 6259571 (2001-07-01), Holderer et al.
patent: 6275344 (2001-08-01), Holderer
patent: 6290363 (2001-09-01), Masutani
patent: 6296811 (2001-10-01), Sasaki
patent: 6307688 (2001-10-01), Merz et al.
patent: 6337484 (2002-01-01), Loopstra et al.
patent: 6341006 (2002-01-01), Murayama et al.
patent: 6369959 (2002-04-01), Trunz et al.
patent: 6373552 (2002-04-01), Braat et al.
patent: 6392825 (2002-05-01), Trunz et al.
patent: 6405533 (2002-06-01), Rastegar et al.
patent: 6411368 (2002-06-01), Matsumoto et al.
patent: 6411426 (2002-06-01), Meehan et al.
patent: 6428173 (2002-08-01), Dhuler et al.
patent: 6445516 (2002-09-01), Osterried
patent: 6473247 (2002-10-01), Keller et al.
patent: 6478434 (2002-11-01), Streetman et al.
patent: 6496466 (2002-12-01), Lee et al.
patent: 6501605 (2002-12-01), Moriya
patent: 6503383 (2003-01-01), Holderer et al.
patent: 6509670 (2003-01-01), Jeong et al.
patent: 6521892 (2003-02-01), Emanuel et al.
patent: 6537479 (2003-03-01), Colea
patent: 6552862 (2003-04-01), Dieker
patent: 6566627 (2003-05-01), Brandinger et al.
patent: 6580570 (2003-06-01), Becker et al.
patent: 6585379 (2003-07-01), Yokoyama et al.
patent: 6594057 (2003-07-01), Drake et al.
patent: 6594204 (2003-07-01), Yamamoto et al.
patent: 6603615 (2003-08-01), Melzer et al.
patent: 6614504 (2003-09-01), Aoki
patent: 6628371 (2003-09-01), Ishikawa
patent: 6633107 (2003-10-01), Calabro et al.
patent: 6646713 (2003-11-01), Ishii
patent: 6653887 (2003-11-01), Haeusser-Boehm et al.
patent: 6727984 (2004-04-01), Becht
patent: 6729062 (2004-05-01), Thomas et al.
patent: 2002/0021903 (2002-02-01), Ito et al.
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 2002/0176094 (2002-11-01), Petasch et al.
patent: 100 15 953 (2000-10-01), None
patent: 1 001 301 (2000-05-01), None
patent: 10-282392 (1998-10-01), None
patent: 410282392 (1998-10-01), None
patent: WO86 05281 (1986-09-01), None
patent: WO99 66542 (1999-12-01), None
Ellis, “Low-cost Bimorph Mirrors in Adaptice Optics,” Imperial College of science, Technology & Medicine, University of London, 1999.
Sato et al., Adaptive PVDF piezoelectric deformable mirror system, Applied Optics, vol. 19, No. 9, 1980, pp. 1430-1434.
Sato et al., “Multilayered deformable mirror using PVDF films,” Applied Optics, vol. 21, No. 20, 1982, pp. 3664-3668.
Sato et al., “Transmission-type PVDF 2-D optical phase modulator,” Applied Optics, vol. 20, No. 2, 1981, pp. 343-350.
Ro et al., “Vibration Control if Plates Using Self-Sensing Active Constrained Layer Damping,” SPIE vol. 3672, 1999, pp. 200-209.
Krug et al., Application of a 6×8 Silicon APD Array and Hybrid Electronics for Scannerless 3D Imaging Ladar, NATO/IRIS Active Systems, 1995, vol. II, pp. 79-89.
Burns et al., “Compact, Multichannel receiver using InGaAs APDs for single pulse, eye,-safe, laser radar imagery,” SPIE vol. 3065, 1997, pp. 22-29.
Schutz et al., “Calibration of an interferometer for testing cylindrical surfaces,” 1995 Elsevier Science, pp. 512-520.
Brandenburg Hartmut
Holderer Hubert
Kohl Alexander
Lang Werner
Carl Zeiss SMT AG
Dunn Drew A.
McNaull Aline D.
Wells St. John P.S.
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