Objective lens for electron microscope

Details Objective lens for electron microscope Objective lens for electron microscope

1981-01-29

1983-05-10

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 2964

Patent

active

043831761

ABSTRACT:
A symmetrical magnetic field type objective lens for an electron microscope comprises an upper magnetic pole piece and a lower magnetic pole piece disposed below the upper pole piece with a predetermined inter-pole distance S. Bores of a same diameter b are formed in the upper and the lower pole pieces, respectively. The distance S and the diameter are selected so that 1.ltoreq.S/b.ltoreq.5. Additionally, excitation J of the objective lens is so selected with respect to a predetermined magnetomotive force Jc.o. of a Riecke-Ruska's condenser objective lens that the condition that 1.4 Jc.o..ltoreq.J.ltoreq.1.7 Jc.o. is fulfilled. The objective lens assures a wide field of view without being accompanied with blurs or distortion of image.

REFERENCES:
patent: 3585546 (1971-06-01), Yanaka et al.
A 100 KV Transmission Electron Microscope With Single Field Condenser Objective, W. D. Riecke, E. Ruska - Sixth International Congress for Electron Microscopy, Kyoto (1966), p. 19.
Objective Lens Properties of Very High Excitation S. Suzuki, K. Akashi and H. Tochigi 1968 Twenty-Sixth Annual EMSA Meeting.

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